Product info
K series oil diffusion vacuum pump is the equipment mainly used for getting the high vacuum (10-2 pa – 10-5 pa) condition. It can make the high vacuum pumping system with valves, water-cooled baffle, pipelines, mechanical vacuum pump, etc, Which can generate 10-2 pa --10-4 pa working vacuum degree. If adopts liquid nitrogen cooling device and baking equipement, it can obtain ultrahigh vacuum (up to 10-6Pa).
Main features:
High pumping capacity, the pumping capacity from 480L/s to 130000L/s.
It adds observation windows (sight glasses), oil inlet and outlet, the protection device for pump oil overheat, the alarm device for cooling water overheat , etc.
There are two kinds of heaters (electric heating wire and electric heating plate) as alternative when you place orders.
Applications:
Its widely used for high technology fields of vacuum coating ( such as Multi-arc ion coating machine, Magnetron sputtering coating machine, Resistance evaporation coating machine, Electron beam evaporation optical coating machine, Rolling vacuum coating, Continuous vacuum coating machine production line /In-line coating production line, etc), vacuum furnace ( such as, vacuum soldering/brazing furnace, vacuum annealing furnace, vacuum tempering furnace, vacuum sintering furnace, vacuum carburizing furnace, etc), electron, chemical industry, metallurgy, aviation, aerospace, material, creature medicine, atomic energy and universe probe, etc.
Specifications
| Item |
K-100 |
K-160 |
K-200 |
K-250 |
K-300 |
K-320 |
K-400 |
K-500 |
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|
Ultimate pressure (Pa) |
5×10-5 |
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|
Pumping Capacity (L/S) |
480 |
1500 |
2500 |
3100 |
4000 |
4600 |
7500 |
11000 |
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|
Critical fore-pump pressure (Pa) |
40 |
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|
Backflow rate mg/(cm2·min) |
≤3×10-2 |
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|
Heating time ( min) |
≤30 |
≤35 |
≤40 |
≤45 |
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|
Heating Power |
0.8-1 |
1.4-1.6 |
1.6-1.8 |
2.2-2.4 |
2.4-3 |
4~5 |
4~5 |
6~8 |
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|
(kw) |
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|
Electric Voltage (AC)V |
220 |
380 |
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|
Pump Oil Model |
KS-3 |
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|
Pump Oil Volume ( L) |
0.15 |
0.45 |
0.55 |
1-1.4 |
1-1.6 |
1.4-1.8 |
3~4 |
4 |
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|
Cooling water consumption (L/H) |
180 |
250 |
300 |
350 |
400 |
420 |
500 |
600 |
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|
Inlet dimension ( mm) |
100 |
160 |
200 |
250 |
300 |
320 |
400 |
500 |
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|
Outlet dimension (mm) |
32 |
50 |
65 |
65 |
80 |
80 |
100 |
100 |
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|
Recommended forepump speed (L/s) |
กก |
กก |
8 |
8 |
15 |
15 |
30 |
70 |
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|
Dimension |
L(Length) |
320 |
420 |
530 |
473 |
695 |
725 |
885 |
1010 |
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|
B(Width) |
260 |
315 |
390 |
450 |
505 |
525 |
665 |
815 |
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|
H(Height) |
365 |
505 |
575 |
650 |
726 |
830 |
925 |
1165 |
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|
Net weight (kg) |
12 |
27 |
32 |
41 |
76 |
85 |
150 |
165 |
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| Item |
K-600 |
K-630 |
K-800 |
K-900 |
K-1000 |
K-1200 |
K-1400 |
K-1600 |
|
|
Ultimate pressure (Pa) |
5×10-5 |
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|
Pumping Capacity (L/S) |
16000 |
18000 |
26000 |
30000 |
40000 |
55000 |
80000 |
110000 |
|
|
Critical fore-pump pressure (Pa) |
40 |
||||||||
|
Backflow rate mg/(cm2·min) |
≤3×10-2 |
||||||||
|
Heating time ( min) |
≤50 |
≤60 |
≤65 |
≤70 |
≤80 |
≤90 |
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|
Heating Power (kw) |
8~9 |
9~11 |
13-13.5 |
14-16 |
17-20 |
28-30 |
38-40 |
48-50 |
|
|
Electric Voltage (AC)V |
380 |
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|
Pump Oil Model |
KS-3 |
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|
Pump Oil Volume ( L) |
6~7 |
7~8 |
12~14 |
14-15 |
15-16 |
22 |
38 |
50 |
|
|
Cooling water consumption (L/H) |
800 |
850 |
1200 |
1350 |
1500 |
2600 |
3400 |
4300 |
|
|
Inlet dimension ( mm) |
600 |
630 |
800 |
900 |
1000 |
1200 |
1400 |
1600 |
|
|
Outlet dimension (mm) |
150 |
160 |
200 |
200 |
300 |
300 |
320 |
320 |
|
|
Recommended forepump speed (L/s) |
70 |
70 |
150 |
150 |
300 |
300 |
350 |
350 |
|
|
Dimension |
L(Length) |
1145 |
1170 |
1520 |
1843 |
1990 |
2235 |
2556 |
2900 |
|
B(Width) |
975 |
1010 |
1275 |
1283 |
1290 |
1750 |
1950 |
2100 |
|
|
H(Height) |
1444 |
1275 |
1870 |
1950 |
2220 |
2465 |
2950 |
3355 |
|
|
Net weight (kg) |
345 |
390 |
620 |
780 |
940 |
1450 |
2050 |
2400 |
|
